得可DEK--apollo

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Fully optimised for Print-on-Print and Selective Emitter processes, Apollo offers ±10 micron accuracy @ 2 Cpk capability and advanced automated features to deliver repeatability, accuracy and high performance - in a low footprint, single line configuration.

Throughput 1500 wafers per hour (wph) at 180mm per second print speedAccuracy +/- 10µm @ 2 CpkBreakage rate < 0.15%Topside cameras for ficucial or pattern alignment380 and 450mm screen size optionsOptional Weigh Station, Paste Dispense and Wafer Breakage SensorOptional Print Inspection station, compatible with popular inspection systemsLine solution with Unloader, Buffer and FlipperBoth IR and convection dryer variants available.